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Sputter Coater & Carbon Coater for Glove Box

Information on a turbo-pumped sputter coater / carbon coater for a glove box, KQ150GB.

Product Description

The KQ150GB is single platform for sputtering and carbon rod evaporation. Metal evaporation using filament or boat sources is possible using an optional insert.

Depending upon user preference, the KQ150GB can be a top-of-the-range sputter coater for high resolution scanning electron microscopy (SEM), or a high vacuum carbon coater suitable for SEM and transmission electron microscopy (TEM). The flexibility of the system can be further expanded using a range of optional accessories.

The KQ150GB can rapidly sputter a wide selection of oxidising and non-oxidising metals making it ideal for many thin film applications.

The KQ150GB has an integral turbomolecular pump and additionally requires a suitable rotary pump or dry pump to "back" the turbomolecular pump (see Option and Accessories).

Flexible modular design

A modular design enables the vacuum chamber to be mounted through the base of the glove box or - when modification to the glove box floor is not possible - inside the glove box (optional feedthroughs are required).

A separate power supply housed in a rugged case is designed to be floor mounted and can be positioned conveniently beneath the glove box or bench. The touch screen user interface is housed in a robust stainless steel case and can be positioned outside of the glove box environment, if preferred.

Options for glove box mounting:

Vacuum module mounted in the floor of the glove box
A cut-out is made in the floor of the glove box and the vacuum chamber fitted and sealed with the gasket supplied. External connections from the floor mounted power supply, vacuum pump and argon gas can then be made directly to the chamber.


Vacuum module placed inside the glove box
The chamber assembly is placed inside the glove box and the power supply, vacuum pump and argon gas connections are made through two KF40 feedthroughs in the rear of the glove box.

Note: each KQ150GB is supplied with an accessory/configuration kit to suit either internally or externally mounted vacuum chambers. Additional kits can be designed on a case-by-case basis to allow the system to be adapted to various manufacturers' glove boxes. Please contact Quorum for more details.

Touch screen user interface

Enclosed in a stainless steel case and mounted at a convenient position outside the glove box, the touch screen allows multiple users to input and store coating protocols.

Vacuum module - including "vacuum shutdown" and glove box pressure interlock

The vacuum module houses all the working components, including the efficient 70L/s air-cooled turbomolecular pump. An automatic bleed control ensures optimum vacuum conditions during sputtering and a full range active gauge is fitted as standard to monitor the vacuum.

The KQ150GB includes "vacuum shutdown", a convenient feature which enhances vacuum performance by allowing the chamber vacuum to be maintained when the coater is not in use.

A unique feature of the KQ150GB is the integral pressure interlock switch. This independently monitors the pressure inside the glove box and shuts off the vacuum pump if the glove box atmosphere is unacceptably reduced due to a vacuum leak.

The vacuum chamber is 214mm high to allow for increased source to substrate distances required for coating large specimens. It has an external diameter of 165mm and comes with an integral implosion guard. The chamber assembly is easily removed to allow specimen exchange and chamber cleaning.

A variable speed rotary specimen stage is fitted as standard, with full height adjustment from 0 to 190mm above the base plate; other stages are available as options.

Sputter coating and carbon coating as standard, plus an option for metal evaporation
"Intelligent" Quick-change deposition inserts

The deposition inserts can be swapped in seconds and the intelligent system logic automatically recognises which insert is in place and displays the appropriate operating settings.

High resolution sputter coating

The KQ150GB features a high-resolution sputter coater insert (10034) for oxidising and non-oxidising (noble) metals. A wide selection of sputtering targets is available, including iridium and chromium, which are highly recommended for FE-SEM applications. Please see Options and Accessories for details of available metal targets.

Carbon rod evaporation

The high vacuum carbon rod coating insert (10033) is ideal for the production of highly stable carbon films and surface replicas for transmission electron microscopy (TEM). The system uses economical 3.05mm diameter carbon rods and the advanced "anti-stick" carbon rod evaporation gun offers simple operation and reproducible results.
A carbon fibre evaporation insert (10455) is available as an option (see Options and Accessories).

Metal evaporation/aperture cleaning option

A quick change insert (10457) allows metal evaporation from tungsten baskets or molybedenum boats - ideal for thin film applications. For ease of set up in a glove box, the metal charge can be loaded into the evaporation source away from the vacuum chamber.

Each of the above configurations can be used with a range of optional accessories. See options and Accessories for details.

Rapid data entry

At the operational heart of KQ150GB is a simple colour touch screen, which allows even the most inexperienced or occasional operators to rapidly enter and store their own process data. To further aid ease of use a number of typical sputtering and evaporation profiles are provided.

KQ150GB mounted in a glove box - overview
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KQ150GB mounted in a glove box - overview
Vacuum chamber assembly
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Vacuum chamber assembly
Vacuum chamber assembly
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Vacuum chamber assembly
Touch screen control module
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Touch screen control module
Sputtering head insert
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Sputtering head insert
During sputtering, optional film thickness monitor (FTM) shown
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During sputtering, optional film thickness monitor (FTM) shown
Carbon rod evaporation insert
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Carbon rod evaporation insert
Metal evaporation insert option
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Metal evaporation insert option
Glow discharge attachment option
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Glow discharge attachment option
Carbon fibre evaporation insert option
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Carbon fibre evaporation insert option
K10057 standard rotating specimen stage and optional film thickness monitor (FTM)
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K10057 standard rotating specimen stage and optional film thickness monitor (FTM)
K10458 4 inch wafer stage option
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K10458 4" wafer stage option

Additional Information

Options and Accessories
Coating inserts including with the Q150GB
A range of interchangeable, plug-in style coating head inserts are available:

* Sputtering head insert (10034) is suitable for oxidising and non-oxidising metals. Supplied with a 54mm Ø x 0.3mm thick chromium target (TK8845) as standard. For additional targets see "Ordering Information" section.
Note: changing sputtering targets is easy, but additional sputter head inserts can be purchase for even quicker coating material change - see 10453 option
* Carbon rod evaporation head insert and accessories for 3.05mm Ø rods (100879)
Optional coating inserts
* Carbon rod evaporation head insert for 6.15mm Ø rods (10456). Note that Quorum recommends 3.05mm Ø rods as they offer greater process control and are more economical (less wastage)
* Carbon fibre evaporation head insert (10455)
* Metal evaporation and aperture cleaning head insert (10457), using tungsten wire baskets and molybdenum boats. Includes electrode extensions to allow upwards evaporation, if required. Note: when the electrodes are fitted some stage options cannot be used
Specimen stages
The Q150GB has specimen stages to meet most requirements. All are easy-change, drop-in style (no screws) and are height adjustable (except for the rotary planetary stage):

* 10067 rotation stage, 50mm Ø (supplied as standard). This stage only rotates - no tilt or height adjustment.
* 10360 rotate-tilt stage, 50mm Ø with height adjustment (target to stage height variable between 37mm and 60mm). The tilt angle can be pre-set.
* 10357 variable angle 'Rota-Cota' rotary planetary specimen stage with 50mm Ø specimen platform with six stub positions for 15mm or 6.5mm or 1/8" pin stubs.
* 10458 flat rotation stage for 4"/100mm wafers. Includes gear box which needs to be fitted when the optional FTM is being used or for coating over the full area of the stage.
* 10358 rotation stage for glass microscope slides. Allows two 75 x 25mm slides to be coated.
Note: all rotation stages have rotation speeds that can be variable between 8 and 20 rpm.
Other options, including FTM and glow discharge
* 10429 extended height chamber (87mm higher than the standard stage) For tall specimens.
* 10454 Film Thickness Monitor (FTM). Consists of a controller and quartz crystal oscillator built into the Q150GB and a vacuum feed though, chamber mounted crystal holder and quartz crystal. As sputtered or evaporated material is deposited onto the crystal, so its frequency of oscillation is modified. This 'modification' is used to measure and control the thickness of material deposited.
* 10837 glow discharge insert. Used to modify surface properties (eg hydrophobic to hydrophilic conversion).
Vacuum module size 267mm W x 490mm D x 494mm H (total height with coating head open: 767mm)
Power supply size 310mm W x 357mm D x 262mm H
User interface size & weight 160mm W x 157mm D x 42mm.
Weight: 40kg
Packed dimensions 725mm W x 660mm D x 787mm H (44kg)
Work chamber Borosilicate glass 152mm Ø (inside) x 214mm H
Safety shield Integral polyethylene terephthalate (PET) cylinder
Display 145mm 320 x 240 colour graphic TFT (Thin Film Transistor) display
User interface Intuitive full graphical interface with touch screen buttons, includes features such as a log of the last 100 coatings carried out and reminders for when maintenance is due
Sputtering target Disc style 57mm Ø x 0.3mm thick chromium target is fitted as standard
Specimen stage 60mm Ø rotation stage. Rotation speed 8 ~ 20 rpm

For alternative stages see Options and Acessories
Specimen shutter An automatic shutter is fitted as standard to shield specimens during pre-sputtering of oxidising metals and protection during evaporation outgassing procedures

Turbomolecular pump Internally mounted, 70L/s air-cooled turbomolecular pump
Rotary pump 5m3/hr-1 two-stage rotary pump with oil mist filter

(order separately: 13034)
Vacuum measurement An active full-range gauge is fitted
Typical ultimate vacuum 5x10-5mbar
Sputter vacuum range Between 5x10-3 and 5x10-1mbar

The Q150GB is interlocked to prevent continuous pumping of the glove box in the event of a vacuum leak

Sputtering 0-150mA to a pre-determined thickness (with optional FTM) or by the built-in timer. The maximium sputtering time is 60 minutes (without "breaking" vacuum and with built-in rest periods)
Carbon evaporation A robust, ripple free, D.C. power supply featuring pulse evaporation ensures reproducible carbon evaporation from rod or fibre sources. Current pulse: 1-90A
Metal evaporation and aperture cleaning insert (option) For thermal evaporation of metals from filaments or molybdenum boat can be fitted. The metal evaporation head is set up for downwards evaporation, but upward evaporation can be achieved by fitting two terminal extensions (supplied). Evaporation times: up to four minutes

Services and other information
Gases Quick-connect inlet for: argon sputtering process gas, 99.999% ("zero grade")
Nitrogen venting gas (no quick-connect - uses the glove box atmosphere as the source
Electrical supply 90-250V ~ 50/60 Hz 1400 VA including rotary pump power. 110/240V voltage selectable
Conformity CE conformity: Power Factor Correction. Complies with the current legislation (CE Certification) and ensures efficient use of power which means reduced running costs
Ordering Information
KQ150GB A modular, high resolution turbomolecular-pumped sputter coater/carbon rod evaporator for glove boxes. Includes:
10034 sputtering insert including TK8845 54mm Ø x 0.3mm chromium target, 10033 carbon rod evaporation insert, including carbon rods (C5423 3.05mm Ø x 300mm) and an S8651 carbon rod shaper (manual operation). Fitted with a 10067 rotation stage

Rotary pump requirements (needs to be ordered separately)
13034 5m3/hr-1 Pfeiffer DUO 6 two-stage rotary pump with vacuum hose, coupling kit and oil mist filter
Note: dry pumps (diaphragm and scroll) are available on request

Other options
10456 Carbon rod evaporation insert for 6.15mm Ø rods
10455 Carbon fibre insert, supplied with 1m A0819 high purity carbon fibre cord and 1m of C5421 standard grade carbon fibre cord. NB: For additional supplies see Carbon supplies
10457 Metal evaporation and aperture cleaning insert, supplied with a pack of ten tungsten filaments (A0754) and a molybdenum boat
10453 Additional sputter insert for quick metal change (TE and TES version only). NB: this is an entire sputtering assembly; individual targets can also be purchased
10837 Glow discharge attachment.
10360 Variable angle "Rotacota" rotary planetary specimen stage
10357 Variable tilt angle specimen stage with adjustable tilt up to 90 degrees.
10458 Flat rotation specimen stage for 4"/100mm wafers, includes gear box for increased coating coverage
10358 Specimen stage for glass microscope slides
10454 Film thickness monitor (FTM) attachment. Including oscillator, feed-through, quartz crystal holder and quartz crystals
FT553 Spare quartz crystals. Pack of three
10429 Extended height vacuum chamber

Sputtering Targets
The Q150GB is fitted as standard with a 0.2mm thick chromium sputtering target (TK8845). Other optional targets:
Part Number Part Description
SC502-31A Gold 57mm Ø x 0.1mm
SC502-31B Gold/palladium (80/20) 57mm Ø x 0.1mm
SC502-31C Platinum 57mm Ø x 0.1mm
SC502-31D Platinum 57mm Ø x 0.1mm
SC502-31E Silver 57mm Ø x 0.1mm
SC502-31G Palladium 57mm Ø x 0.1mm
SC502-31H Copper 57mm Ø x 0.1mm
TK8845 Chromium 54mm Ø x 0.3mm
TK8846 Tungsten 57mm Ø x 0.5mm
TK8862 Chromium 54mm Ø x 1.5mm
TK8867 Tungsten 57mm Ø x 0.2mm
TK8869 Carbon 54mm Ø x 1.5mm
TK8875 Aluminium 57mm Ø x 1.0mm
TK8877 Palladium 57mm Ø x 0.1mm
TK8878 Platinum/palladium (80/20) 57mm Ø x 0.1mm
TK8879 Titanium 57mm Ø x 1.5mm
TK8887 Platinum/palladium (80/20) 57mm Ø x 0.3mm
TK8889 Gold 57mm Ø x 0.3mm
TK8891 Gold/palladium (60/40) 57mm Ø x 0.3mm
TK8893 Platinum 57mm Ø x 0.3mm
TK8895 Titanium 57mm Ø x 0.5mm
TK8897 Iron 57mm Ø x 0.1mm
TK8899 Iridium 57mm Ø x 0.2mm
TK8900 Cobalt 57mm Ø x 0.1mm
TK8902 Tin 57mm Ø x 0.1mm
TK8903 Molybdenum 57mm Ø x 0.1mm
TK8905 Magnesium 57mm Ø x 0.3mm
TK8906 Tantalum 57mm Ø x 0.1mm
TK9000 Alumina 57mm Ø x 0.76mm
TK8907 ITO 57mm Ø x 0.3mm

Carbon supplies
C5422 Carbon rods 3.05 Ø x 300mm, unshaped (pack of 10)
A0830A Carbon rods 6.15 Ø x 100mm, shaped (pack of 10)
A0832A Carbon rods 3.05 Ø x 50mm, shaped (pack of 10)
A0819 Carbon fibre cord - high purity - 1m
A0819-5 Carbon fibre cord - high purity - 5ma
C5421 Carbon fibre cord - standard grade - 1m
C5421-10 Carbon fibre cord - standard grade - 10m
C5421-100 Carbon fibre cord - standard grade - 100m
S8650 Manual rod shaper for 6.15 Ø carbon rods
S8651 Manual rod shaper for 3.05 Ø carbon rods (one included with the Q150GB

Other consumables and spare parts
A0754 Metal evaporation basket - pack of 10 (for use with 10457 metal evaporation head)
10449 Two-year spares kit for Q150GB. Includes: TK8845 chromium target, C5421 carbon fibre cord, C5461 carbon fibre - fine, C5422 carbon rods 3.05mm, spare glass cylinder assembly, C5460 quartz crystals, O-rings, springs
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