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Comparative Sputter Data

Comparative sputter data for Iridium and other materials on K575X sputter coater.

Samples were coated using an Emitech K575X Sputter Coater and were examined using a Hitachi S-5200 Field Emission SEM. Pictures are courtesy of Linda Dailey, Emitech Products Inc.

GoldEmitech K-575X Sputter Coater sample 1Emitech K-575X Sputter Coater sample 2Emitech K-575X Sputter Coater sample 3
Magnification15,000X100,000X300,000X
Coating Time:10 seconds10 seconds10 seconds
Current Used:20 mA20 mA20 mA
Gold/PalladiumEmitech K-575X Sputter Coater sample 4Emitech K-575X Sputter Coater sample 5Emitech K-575X Sputter Coater sample 6
Magnification15,000X100,000X300,000X
Coating Time:10 seconds10 seconds10 seconds
Current Used:20 mA20 mA20 mA
ChromiumEmitech K-575X Sputter Coater sample 7Emitech K-575X Sputter Coater sample 8Emitech K-575X Sputter Coater sample 9
Magnification15,000X100,000X300,000X
Coating Time:30 seconds30 seconds30 seconds
Current Used:100 mA100 mA100 mA
IridiumEmitech K-575X Sputter Coater sample 10Emitech K-575X Sputter Coater sample 11Emitech K-575X Sputter Coater sample 12
Magnification15,000X100,000X300,000X
Coating Time:10 seconds10 seconds10 seconds
Current Used:20 mA20 mA20 mA
No CoatingEmitech K-575X Sputter Coater sample 13Emitech K-575X Sputter Coater sample 14Emitech K-575X Sputter Coater sample 15
Magnification15,000X100,000X300,000X
Coating Time:N/AN/AN/A
Current Used:N/AN/AN/A
PlatinumEmitech K-575X Sputter Coater sample 16Emitech K-575X Sputter Coater sample 17Emitech K-575X Sputter Coater sample 18
Magnification15,000X100,000X300,000X
Coating Time:N/AN/AN/A
Current Used:N/AN/AN/A

Magnifications provided are indicative and will vary with reproduction and monitor size used.

Comparative sputtered films using the Q150T Turbo-Pumped Sputter Coater/Carbon Coater (Au, Pt, Ir and Cr) Comparative sputtered films using the Q150T Turbo-Pumped Sputter Coater/Carbon Coater (Au, Pt, Ir and Cr) Comparative sputtered films using the Q150T Turbo-Pumped Sputter Coater/Carbon Coater (Au, Pt, Ir and Cr) Comparative sputtered films using the Q150T Turbo-Pumped Sputter Coater/Carbon Coater (Au, Pt, Ir and Cr)

Comparative sputtered films using the Q150T Turbo-Pumped Sputter Coater/Carbon Coater (Au, Pt, Ir and Cr)

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